SOG材料与传统SOI材料一样,拥有许多优良的电学性能,例如SOG电路具有高开关速度、高密度、低压和低功耗等优点.同时由于SOG材料具有突出的光电性能,在太阳能电池和液晶显示器等光电设备中也有着广泛的应用,引起了人们越来越广泛的关注.本文综述了SOG材料的特点和应用,着重介绍了SOG材料的各种制备方法和新进展.
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