采用射频等离子体增强化学气相沉积法(rf-PECVD),在45钢表面沉积了类金刚石(DLC)薄膜,借助激光拉曼光谱仪(Raman)、X射线光电子能谱(XPS)、扫描电子显微镜(SEM)和原子力显微镜(AFM),分析了DLC膜的键结构、表面形貌和结构特征,用原位纳米力学测试系统测定了薄膜的硬度.以GCr15钢为摩擦副材料,用UMT-Ⅱ摩擦磨损实验机考察了不同载荷和滑行速度条件下DLC膜的摩擦膺损性能,并分析了磨损机理.结果表明,在45钢表面沉积的薄膜具有典型的类金刚石薄膜的结构特征,薄膜表面由致密的纳米级颗粒组成,具有较高的硬度.在各种摩擦蘑损实验条件下DLC薄膜表现出良好的抗磨损性能,摩擦系数均明显比45钢的低,尤其在高速低载下摩擦系数低至0.008.
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