采用磁控溅射法制备CdZnTe先驱薄膜/金属Al膜的层叠结构,利用铝诱导技术制备CdZnTe薄膜.通过原子力显微镜、X射线衍射、Raman光谱仪和半导体特性分析系统,研究了铝膜溅射功率对铝诱导CdZnTe薄膜结构及性能的影响.结果表明:随着铝膜溅射功率的增加,铝诱导CdZnTe薄膜表面的薄膜结晶质量、晶粒尺寸和薄膜电阻率先增大后减小.铝诱导晶化的效果与铝膜溅射功率有关,当铝膜溅射功率达到100 W,CdZnTe薄膜的晶化诱导效果最显著,薄膜结晶质量最好,晶粒尺寸最大.
参考文献
| [1] | 韦永林 .碲锌镉探测器的制备及性能研究[D].四川大学,2005. |
| [2] | Sellin PJ .Thick film compound semiconductors for X-ray imaging applications[J].Nuclear Instruments and Methods in Physics Research, Section A. Accelerators, Spectrometers, Detectors and Associated Equipment,2006(1):1-8. |
| [3] | The metal-induced crystallization of poly-Si and the mobility enhancement of thin film transistors fabricated on a glass substrate[J].Microelectronic engineering,2010(11):2163-2167. |
| [4] | Ekanayake G;Quinn T;Reehal HS .Large-grained poly-silicon thin films by aluminium-induced crystallisation of microcrystalline silicon[J].Journal of Crystal Growth,2006(2):351-358. |
| [5] | Dimova-Malinovska D;Grigorov V;Nikolaeva-Dimitrova A;Angelov O;Peev N .Investigation of aluminium structural properties of poly-Si thin films obtained by induced crystallization in different atmospheres[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1/2):358-361. |
| [6] | 梁戈,郭烈萍,李洪涛,蒋百灵,焦栋茂.铝层厚度对铝诱导非晶硅薄膜晶化过程的影响[J].人工晶体学报,2011(01):114-118. |
| [7] | 潘松海,周海,曾冬梅.铝诱导对磁控溅射制备CdZnTe薄膜结晶的影响[J].功能材料,2013(06):862-865. |
| [8] | Hutter, E;Fendler, JH .Exploitation of localized surface plasmon resonance[J].Advanced Materials,2004(19):1685-1706. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%