本文在国际上首次提出一种结合压电效应和电流变效应的新型平面步进式驱动器.研制的驱动器具有4个提供驱动力和产生位移的多层压电致动器,以及4个用来箝位的电流变箝位器.通过箝位器与压电致动器的不同组合,根据仿生运动模式,可实现沿x向或y向的蠕动式步进运动.实验结果显示,平面步进驱动器样机在x向和y向都能灵活的运动,并具有大行程和低于0.1μm的高分辨率.实验中观察到驱动器的最高步进速度为6mm/min,最大承载能力为1.7N(170gf).
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