概述了超临界CO_2流体特性及其电化学沉积新方法.分析了表面活性剂、CO_2的含量和电解液的三元体系及过程参数对形成的导电乳化液及沉积层微观结构的影响规律.利用该项新技术,在制备高性能镀膜材料等方面取得了积极的进展,其镀膜平整、晶粒细小(小于100nm),显微硬度和耐磨性比普通电镀层有显著提高.最后展望了未来的发展方向.
The characteristics of CO_2 supereritieal fluids and a new electroplating method are summarized. The effects of the ternary system of a surfactant, dense CO_2 concentration and the electroplating solution on conducive emul-sion and deposit film microstructure in supercritical CO_2 electroplating are analyzed including process parameters. The remarkable progress of the high-performance films produced in supercritical fluids electroplating is presented, which has a higher uniformity, a smaller grain size(sub-100nm), a significantly micro-hardness and wear resistance compared with electroplating from the only solution. At last, the potential developments of this technology in the future are ex-pected.
参考文献
| [1] | T.-H. Tsai;H. Yang;R. Chein .New electroforming technology pressure aid for LIGA process[J].Microsystem technologies,2004(5):351-356. |
| [2] | El-Sherik A M;Erb U;Page J .Microstructural evolution in pulse plated nickel electrodeposition[J].Surface and Coatings Technology,1996,88:70. |
| [3] | 雷卫宁,朱荻.添加纳米氧化镧的脉冲电铸试验研究[J].中国机械工程,2008(05):543-546. |
| [4] | 明平美,朱荻,胡洋洋,曾永彬.超声微细电铸试验研究[J].中国机械工程,2008(06):644-647. |
| [5] | 雷卫宁;朱荻;李东林 等.高性能微细电铸的实验研究[J].工程材料,2008,10:25. |
| [6] | Ehrfeld W .Electrochemisry and microsystem[J].Electrochimica Acta,2003,48(20-22):2857. |
| [7] | 董世运,徐滨士,马世宁.纳米颗粒复合刷镀层性能研究及其强化机制探讨[J].中国表面工程,2003(03):17-21. |
| [8] | McHardy J;Sawan S P.Supercritical fluid cleaning[M].New Jersey:Noyes Publications,1991 |
| [9] | Taylor L T.Supercritical fluid extraction[M].New York:John Wiley and Sons,Inc,1996 |
| [10] | 朱自强.超临界流体技术原理和应用[M].北京:化学工业出版社,2000 |
| [11] | 韩布兴.超临界流体科学与技术[M].北京:中国石化出版社,2004 |
| [12] | Tsai W L;Hsu P C;Hwu Y et al.Building on bubbles in metal electrodeposition[J].Nature,2002,6885(417):139. |
| [13] | Eastoe J;Paul A;Nave S et al.Micellization of hydrocarbon surfactants in supercritical carbon dioxide[J].American Chemical Society,2001,5(123):988. |
| [14] | Wakayama H;Fukushima Y .Nanoporous silica prepared with activated carbon molds using supercritical CO_2[J].Chemistry of Materials,2000,3(12):756. |
| [15] | Grinberg V A;Mazin V M .Electrochemical processes in liquid and supercritical carbon dioxide[J].Russ Electrochem,1998,3(34):245. |
| [16] | 雷卫宁;李仁兴;于赟 等.超临界流体微细电铸成型工艺及其装置[P].中国,CN101092716,2007-12-26. |
| [17] | Yan H;Sone M;Mizushima A;Nagai T;Abe K;Ichihara S;Miyata S .Electroplating in CO2-in-water and water-in-CO2 emulsions using a nickel electroplating solution with anionic fluorinated surfactant[J].Surface & Coatings Technology,2004(1):86-92. |
| [18] | Kim M S;Kim J Y;Kirn C K et al.Study on the effect of temperature and pressure on nickel-electroplating characteristics in supercritical CO_2[J].Chemosphere,2005,58:459. |
| [19] | Hong K M;Kim M S;Yong C L et al.The characteristics of nickel-electroplated on copper substrate in CO_2 supercritical fluid[J].Metastable Nanocryst Mater,2005,23:247. |
| [20] | Hong K M;Kim M S;Chung J G .Characteristics of a nickel film electroplated on a copper substrate in supercritical CO_2[J].Industrial and Engineering Chemistry,2004,10:683. |
| [21] | Kim J R;Kim H K;Kyong J B .Solubilities of naphthalene in supercritical fluids[M].Korean Chem Soc,1988,32:311. |
| [22] | Yoshida H.;Sone M.;Mizushima A.;Yan H.;Wakabayashi H.;Abe K.;Tao XT. Ichihara S.;Miyata S. .Application of emulsion of dense carbon dioxide in electroplating solution with nonionic surfactants for nickel electroplating[J].Surface & Coatings Technology,2003(2/3):285-292. |
| [23] | Wakabayashi H;Sato N;Sone M;Takada Y;Yan H;Abe K;Mizumoto K;Ichihara S;Miyata S .Nano-grain structure of nickel films prepared by emulsion plating using dense carbon dioxide[J].Surface & Coatings Technology,2005(2/3):200-205. |
| [24] | Guerra R M;Matin M L;Sanchez A et al.Effect of pressure,temperature and time on supercritical fluid extraction of citrate and benzoate plasticisers from poly(vinyl chloride)[J].Supercrit Huid,2002,22:111. |
| [25] | Yan H;Sone M;Sato N;Ichihara S;Miyata S .The effects of dense carbon dioxide on nickel plating using emulsion of carbon dioxide in electroplating solution[J].Surface & Coatings Technology,2004(2/3):329-334. |
| [26] | Rahman MZ;Sone M;Eguchi M;Ikeda K;Miyata S;Yamamoto T .Wear properties of nickel coating film plated from emulsion with dense carbon dioxide[J].Surface & Coatings Technology,2006(3/4):606-611. |
| [27] | Yoshida H;Sone M;Mizushima A et al.Electroplating of nanostructured nickel in emulsion of supercritical carbon dioxide in electrolyte solution[J].Chemistry Letters,2002,11:1086. |
| [28] | Yoshida H;Sone M;Wakabayashi H et al.New electroplating method of nickel in emulsion of supercritical carbon dioxid and electroplating solution to enhance uniformity and hardness of plated film[J].Thin Solid Films,2004,446:194. |
| [29] | Balckburn J M;Long D P;Cabanas A et al.Deposition of conformal copper and nickel films supercritical carbon dioxide[J].Science,2001,294:141. |
| [30] | Cabanas A.;Shan XY.;Watkins JJ. .Alcohol-assisted deposition of copper films from supercritical carbon dioxide[J].Chemistry of Materials,2003(15):2910-2916. |
| [31] | Hunde E T;Watkins J J .Reactive deposition cobalt and nickel films from their metallocenes in supercritical carbon dioxide solution[J].CHEMISTRY OF MATERIALS,2004,16:498. |
| [32] | Ye X R;Lin Y et al.Supercritical fluid immersion deposition:A new process for selective deposition of metal fimls on silicon substrates[J].Surface and Coatings Technology,2005,190:25. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%