采用化学溶液沉积法,在Si[100]衬底上制备了掺La的(Bi0.8La0.2)2Ti2O7薄膜,研究了退火温度对薄膜结晶性及电学性能的影响.研究发现,随着退火温度的升高,样品的结晶性越来越好;漏电流密度随之降低,表明绝缘性逐渐增强.实验证明该薄膜具有良好的绝缘性和较高的介电常数.
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