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基于磁控溅射离了镀技术,制备了不同晶态结构的纯Cr薄膜,分析了电场环境对纯Cr薄膜品态结构影响的客观规律;结合溅射原理和薄膜生长原理揭示了电场环境对纯Cr薄膜生长过程影响的内在机理;探讨了磁控溅射离子镀技术在工程材料的纳米化、非晶化进程中应有的功能,旨在为纳米材料的研发及其制备技术的创新提供参考依据.

参考文献

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