研究了X射线衍射的结构深度分布分析新方法该方法以不同的入射角入射，测量各物相的衍射谱，进而解出各确定深度处薄层的X射线衍射谱，从而可无损和定量地得到各深度处的衍射线的角度位置、强度和线型等全部结构信息此方法可得到各确定深度处的结构信息，而不是由表面到某深度处的平均结构信息；并且适用于具有择优取向的样品和吸收系数随深度而变化的样品．用此方法研究了Pd／Ag双层膜的退火过程，发现在互扩散的过程中，平行于初始界面的薄层中的结构不是微观均匀的，而是由两种具有不同点阵参数的固溶体构成的．结果证实该方法的可行性和有效性，也有利于研究Pd／Ag系统以及相关系统的扩散机理
A method has been presented to obtain all X-ray diffraction information, which including the peak intensity, peak position and peak profile, of each layer at different depth respectively. This method can be named as structure depth profiling or computed depth profiling technique of X-ray diffraction (XRD). The samples of Pd(200 nm)/Ag(200 nm) bilayer thin films were used to test this method and to study the interdiffusion in the Pd/Ag system. For sample annealed at 490℃ for 20 min, it was found that there were two solid solutions with different lattice parameter in each layer at different depth. It means that the structure of each layer parallel to the surface is not homogeneous microscopically in the interdiffusion process.
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