采用溶胶-凝胶法,在304不锈钢表面制备了分别经500℃、600℃和700℃下热处理的ZrO2薄膜.利用X射线衍射仪(XRD)、原子力显微镜(AFM)、扫描电镜(SEM)和摩擦磨损测试仪,研究了热处理温度对ZrO2薄膜的表面结构和摩擦学性能的影响.结果表明:随着温度的升高,ZrO2晶体结构逐渐由四方相(t-ZrO2)向单斜相(mZrO2)转变;当热处理温度从500℃升高到700℃时,ZrO2薄膜的平均晶粒度略有增大,但都在80 nm左右,晶粒分布趋于均匀致密,且其表面粗糙度由6.3 nm降低至4.6 nm左右.同时ZrO2薄膜的摩擦系数和磨损率分别从0.22和2.24×10-4mm3/Nm逐渐减小为0.19和1.95×10-4 mm3/Nm,因而薄膜的抗磨减摩性能也显著提高.
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