本文采用TiO2陶瓷靶及射频磁控溅射法在玻璃衬底上制备出了一系列透明TiO2薄膜,利用X射线衍射(XRD)和原子力显微镜(AFM)对不同衬底温度和溅射功率的TiO2薄膜结构和形貌进行了表征,结果随着溅射条件的不同会出现锐钛矿或锐钛矿-金红石的混合相.利用UV-Vis-Nir分光光度计测得的透射光谱表明随着衬底温度和溅射功率的增加吸收边有一定的红移.薄膜的光催化活性通过对罗丹明B溶液的降解效率来表征,结果表明在550℃和130W表面出最佳的光催化效果.
Transparent titania thin films were prepared on glass substrates by radio frequency magnetron sputtering from TiO2 ceramic target. The structure and morphology of those films with different sputtering power and substrate temperature has been measured with X-ray diffractometer (XRD) and atomic force microscope (AFM). It was found that the films were anatase and a mix of anatase-rutile with different condition. The transmission of the films has been studied by using UV-VIS-NIR spectrometer. It shows absorption edge has a little red shift with the increase of sputtering power and substrate temperature. The photocatalytic activity of the films was tested on the degradation of Rhodamine B solution. The highest degradation efficiency in our experiment was obtained in the film deposited at 550℃ and 130W.
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