Effect of substrate temperature on microstructural and optical properties of ZnO films grown by pulsed laser deposition

稀有金属（英文版）, 2006, 25(2): 161-165.

^1, , ^2, , ^3, , ^4, , ^5, , ^6,

1.Institute of Semiconductor, Shandong Normal University, Jinan 250014, China

2.Institute of Semiconductor, Shandong Normal University, Jinan 250014, China

3.Institute of Semiconductor, Shandong Normal University, Jinan 250014, China

4.Institute of Semiconductor, Shandong Normal University, Jinan 250014, China

5.Institute of Semiconductor, Shandong Normal University, Jinan 250014, China

6.Institute of Semiconductor, Shandong Normal University, Jinan 250014, China

基金项目: Key Research Program of National Natural Science Foundation of China(90301002 and 90201025)

Effect of substrate temperature on microstructural and optical properties of ZnO films grown by pulsed laser deposition

Keywords： semiconductor materials

ZnO thin films were deposited on n-Si (111) at various substrate temperatures by pulsed laser deposition (PLD).X-ray diffraction (XRD), photoluminescence (PL), Fourier transform infrared spectrophotometer (FTIR), and scanning electron microscopy (SEM) were used to analyze the structure, morphology, and optical property of the ZnO thin films. An optimal crystallized ZnO thin film was obtained at the substrate temperature of 600℃. A blue shift was found in PL spectra due to size confinement effect as the grain sizes decreased. The surfaces of the ZnO thin films were more planar and compact as the substrate temperature increased.

参考文献

[1]	Chen YF.;Zhu ZQ.;Sekiuchi T.;Park KT.;Hiraga K.;Yao T. Koyama S.;Shen MY.;Goto T.;Bagnall DM. .GROWTH OF ZNO SINGLE CRYSTAL THIN FILMS ON C-PLANE (0 0 0 1) SAPPHIRE BY PLASMA ENHANCED MOLECULAR BEAM EPITAXY[J].Journal of Crystal Growth,1997(1/2):165-169.
[2]	Sundaram KB.;Khan A. .CHARACTERIZATION AND OPTIMIZATION OF ZINC OXIDE FILMS BY RF MAGNETRON SPUTTERING[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(1/2):87-91.
[3]	Smith F T J .Metalorganic chemical vapor deposition of oriented.ZnO films over large areas[J].Applied Physics Letters,1983,43:1108.
[4]	Duclere JR;O'Haire R;Meaney A;Johnston K;Reid I;Tobin G;Mosnier JP;Guilloux-Viry M;McGlynn E;Henry MO .Fabrication of p-type doped ZnO thin films using pulsed laser deposition[J].Journal of Materials Science. Materials in Electronics,2005(7):421-427.
[5]	Kunimoto T;Kakehi K;Yoshinatsu R;Ohmi K Tanaka S Kobayashi H .Blue-emitting Eu2+-doped CaA12O4 phosphor thin films prepared using pulsed laser deposition technique with post annealing[J].Japanese Journal of Applied Physics,2001,40(10B):Ll126.
[6]	Katsumi Tanaka;Koh-ichi Ohga;Cheow-Keong Choo;Ryouhei Nakata .Sm-doped CdWO_(4) thin films synthesized by pulsed laser deposition[J].Journal of Applied Physics,2001(10):5369-5375.
[7]	M. B. Korzenski;Ph. Lecoeur;B. Mercey;B. Raveau .Nd:YVO_4 Thin Films Grown by Pulsed Laser Deposition: Effects of Temperature and Pressure on the Grain Morphology and Microstructure[J].Chemistry of Materials,2001(5):1545-1551.
[8]	Zhao J L;Li X M;Bian J M;Yu W D Gao X D .Structural,optical and electrical properties of ZnO films grown by pulsed laser deposition (PLD)[J].Journal of Crystal Growth,2005,276:507.
[9]	Myoung J M;Yoon W H;Lee D H;Yun I Bae S H Lee S Y .Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition[J].Japanese Journal of Applied Physics,2002,41:28.
[10]	Fujimura N;Nishihara T;Goto S;Xua J Ito T .Control of preferred orientation for ZnOx films:control of self-texture[J].Journal of Crystal Growth,1993,130:269.
[11]	King SL.;Boyd IW.;Gardeniers JGE. .PULSED-LASER DEPOSITED ZNO FOR DEVICE APPLICATIONS[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1996(0):811-818.
[12]	Wang QP.;Zhang DH.;Xue ZY.;Hao XT. .Violet luminescence emitted from ZnO films deposited on Si substrate by rf magnetron sputtering[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2002(1/4):123-128.
[13]	Jin B J;Im S;Lee S Y .Violet and UV luminescence emitted from ZnO thin films grown on sapphire by pulsed laser deposition[J].Thin Solid Films,2000,366:107.
[14]	Ding RQ.;Wang H. .Microstructure and optical properties of GaAs/SiO2 nanogranular films prepared by magnetron co-sputtering[J].Materials Chemistry and Physics,2003(3):841-845.
[15]	Demichelis F;Crovini G;Pirri C F;Tresso E Amato G Coscia U Ambrosone G Rava P .Optimization of a-Si1-xCx:H films prepared by ultrahigh vacuum plasma enhanced chemical vapour deposition for electroluminescent devices[J].Thin Solid Films,1994,241:274.
[16]	Laidani N;Capelletti R;Elena M;Guzman L Mariotto G Miotello A Ossi P M .Spectroscopic characterization of thermally treated carbon-rich Si1-xCx films[J].Thin Solid Films,1993,223:114.
[17]	Bachari E M;Baud G;Amor S B;Jacquer M .Structural and optical properties of sputtered ZnO films[J].Thin Solid Films,1999,348:165.

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Effect of substrate temperature on microstructural and optical properties of ZnO films grown by pulsed laser deposition

参考文献