含Ni-Al阻挡层硅基BiFe0.95Mn0.05O3铁电电容器的结构及物理性能

人工晶体学报, 2011, 40(1): 33-37.

含Ni-Al阻挡层硅基BiFe0.95Mn0.05O3铁电电容器的结构及物理性能

陈剑辉 ^1, , 刘保亭 ^2, , 魏大勇 ^3, , 王宽冒 ^4, , 崔永亮 ^5, , 王英龙 ^6, , 赵庆勋 ^7, , 韦梦袆 ^8,

1.河北大学物理科学与技术学院,保定,071002

2.河北大学物理科学与技术学院,保定,071002

3.河北大学物理科学与技术学院,保定,071002

4.河北大学物理科学与技术学院,保定,071002

5.河北大学物理科学与技术学院,保定,071002

6.河北大学物理科学与技术学院,保定,071002

7.河北大学物理科学与技术学院,保定,071002

8.河北大学物理科学与技术学院,保定,071002

基金项目: 高等学校博士点基金(20091301110002) 河北省自然科学基金(E2008000620) 河北省应用基础研究计划重点基础研究项目(10963525D) 国家自然科学(60876055;11074063)

关键词： BiFe0.95Mn0.05O3 , Ni-Al , 阻挡层 , 漏电机制

Structure and Physical Properties of Si-based BiFe0.95Mn0.05O3Ferroelectric Capacitor Using Ni-Al as the Barrier Layer

以Ni-Al为阻挡层,在Si衬底上构架了SrRuO3(SRO)/BiFe0.95Mn<0.05O3(BFMO)/SRO异质结电容器.x射线衍射(XRD)分析表明:Ni-Al阻挡层为非晶结构,BFMO薄膜为具有良好结晶质量的多晶结构.在5 kHz测试频率下,SRO/BFMO/SRO电容器呈现饱和的电滞回线.实验发现,SRO/BFMO/SRO铁电电容器具有良好的抗疲劳性能.漏电机制研究表明,外加电场小于210 kV/cm时,SRO/BFMO/SRO电容器满足欧姆导电机制,在电场大于210kV/cm时,满足空间电荷限流传导机制.

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