采用激光分子束外延法在蓝宝石衬底上异质外延β-Ga2O3薄膜.研究了氧分压对薄膜表面结构和结晶程度的影响,结果表明β-Ga2O3薄膜的均方根粗糙度和X射线衍射谱峰的半高宽随着氧分压的减小呈现先减小后增大的趋势.并对氧分压为10-2Pa条件下的薄膜进行了光致发光谱、紫外透射谱、禁带宽度变化和拉曼谱的研究,结果显示β-Ga2O3薄膜的带隙随氧分压的减小而不断增大,β-Ga2O3薄膜具有蓝光发光和深紫外高透射特性,是用于光电器件特别是紫外特性氧敏传感器的最佳材料之一.
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