ZnO薄膜作为第三代半导体功能材料,高质量的p型掺杂是基于光电器件应用的关键.概述了ZnO薄膜V族元素氮、磷、砷(N、P、As)p型掺杂的研究进展,分析对比了3种元素的掺杂和p型转变特性,简单介绍了共掺杂技术,提出了有待进一步研究的问题.
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