在H13钢基体上制备了几种成分的CrNx双层膜和梯度膜.使用X光电子能谱(XPS)分析了膜层的成分,使用X射线衍射仪(XRD)分析膜层的主要相结构;同时检测了膜层的硬度与工艺参数的关系.系统地研究了膜层的动电位极化曲线,梯度膜能够明显降低膜层的腐蚀电流密度.使用扫描电子显微镜(SEM),研究了膜层显微结构和性能之间的关系,并提出了双层膜和梯度膜的结构模型.膜层的主要成分、结构都随着氮气分压而改变.随着氮气分压从0.05 Pa提高到2 Pa,CrNx膜层中的N/Cr原子比从0.08提高到0.67.氮气分压0.05 Pa时,双层膜的成分包括Cr(bcc)和Cr2N(hex),在分压达到2 Pa时,膜层主要成分为CrN(fcc),在梯度膜中有一个CrN(220)择优取向.相对于CrN/Cr/H13双层膜,梯度薄膜的抗腐蚀性能有明显提高.在双层膜上有较多较深的微孔,而在梯度膜表面比较鲜见.
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