采用阳极氧化法在纯钛表面制备TiO2纳米管阵列膜层，利用XRD、FESEM等研究了阳极氧化时间、氧化电压以及退火对TiO2纳米管形貌和结构的影响，并讨论了其形成机理。结果表明：采用此方法可在纯钛表面制备出排列有序的TiO2纳米管阵列膜层；随着氧化电压的升高，纳米管直径增大，管状特征明显；随着氧化时间的延长，纳米管尺寸更均匀，排列更整齐；退火前，纳米管为无定形态，经450℃退火后，TiO2大部分为锐钛矿相，少部分为金红石相。
TiO2 nanotube array film was prepared on the surface of pure Ti by anodic oxidation. The effects of anodic oxidation time, oxidation voltage and annealing on the morphology and structure of the TiO2 nanotube were investigated by means of XRD and FESEM. Mechanism of the formation of nanotube arrays were discussed. The results show that ordered TiO2 nanotube array film could be prepared on the surface of pure Ti by this method. With increase of the oxidation voltage, the diameter of the nanotube increased, and tubular characteristics was obvious. With prolongation of the oxidation time, the nanotube size was more uniform and arranged more regular. Before annealing, the nanotubes were amorphous state; after annealing at 450 ℃, most of the TiO2 was anatase phases with little rutile phases.
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