非晶铟镓锌氧化物(a-IGZO)薄膜,作为一种新型透明氧化物半导体材料,最近引起了广泛关注.这主要是由于它优异的性能可以使它作为薄膜晶体管的有源层材料,在显示行业有巨大的应用前景.本文首先介绍了铟镓锌氧化物的结构,同时综述了非晶铟镓锌氧化物薄膜的制备方法,包括溅射、悬涂和喷墨印刷技术；最后对基于铟镓锌氧化物薄膜晶体管背板技术的产业化进行了展望.
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