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运用扩散偶技术结合电子探针微区成分分析方法对Nb-Ti-Si三元扩散偶进行相分析,测得Nb-Ti-Si三元系1473K下所生成的7个扩散层,分别是TiSi2,TiSi,Ti5Si4,Ti5Si3,Nb5Si3,NbSi2和M3Si,此扩散偶中未发现三元化合物.并根据扩散偶中的相区分布和相图中相区分布的关系,得出Nb-Ti-Si三元系1473K下的等温截面.

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