Sol-Gel法制备ZrO_2-SnO_2薄膜的常温气敏机理

材料研究学报, 1997, 11(4): 357-362.

Sol-Gel法制备ZrO_2-SnO_2薄膜的常温气敏机理

华中理工大学

中国科学院国际材料物理中心

ROOM TEMPERATURE GAS SENSING MECHANISM OF SnO_2-ZrO_2 THIN FILMS PREPARED BY THE SOL-GEL TECHNIQUE

FANG Guojia , LIU Zuli , ZHANG Jie (Huazhong Univ. ofSci. & Tech.)YAO Kailun (International Center For Malerial Physics , Chinese Academy of Sciences)

Keywords： ZrO2-SnO2 thin film Sol-gel technique gas sensing mechanism model at room temperature response and recovery behaviour , ZrO_2-SnO_2薄膜 , 常温气敏机理 , 响应恢复特性

根据Sol-Gel工艺制备的ZrO2-SnO2薄膜的气敏性能数据,提出了常温下SnO2(ZrO2)薄膜对H2S的气敏机理模型.根据此模型所得定量分析结果与实验结果一致.

According to the experimental results of gas sensing properties of SnO2(ZrO2) thin films prepared by the Sol-Gel technique. a sensing mechanism model for SnO2(Zro2) thin films to H2S at room temperature was proposed. With this model, the quantitative resu

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材料期刊网

Sol-Gel法制备ZrO_2-SnO_2薄膜的常温气敏机理

ROOM TEMPERATURE GAS SENSING MECHANISM OF SnO_2-ZrO_2 THIN FILMS PREPARED BY THE SOL-GEL TECHNIQUE

参考文献