利用金属蒸汽真空弧（MEVVA）离子源在AZ31镁合金表面进行了氮钛（N/Ti）双离子共注入。通过俄歇电子能谱（AES）、扫描电镜（SEM）、X射线衍射（XRD）、电化学测试系统和显微硬度计,分析比较了双离子共注入前后试样表面的相组成、原子浓度-深度分布、抗腐蚀性能和显微硬度。结果表明：基体合金表面改性层主要由Mg、MgO、Ti、TiO2、TiN等相组成;改性层厚约180 nm;处理后试样显微硬度较基体提高了50%;在3.5%饱和NaCl溶液中的腐蚀电位提高600 mV,腐蚀电流密度下降110μA.cm2,极化电阻增加了67.9倍。
Nitrogen and titanium duplex ion implantation was conducted on AZ31 magnesium alloy surface by metal vapor vacuum arc（MEVVA） ion implantor.The phases,atomic concentration-depth distribution,corrosion resistance and microhardness of the modified alloy were investigated by means of auger electron spectroscopy（AES）,scanning electronic microscopy（SEM）,X-ray diffraction（XRD）,electrochemical corrosion and microhardness tests.The results show that the surface layer is composed of Mg,MgO,Ti,TiO2 and TiN phases,and the modification-layer depth is about 180 nm,microhardness of the treated sample increases by 50%,compared with that of the untreated sample.The corrosion potential increases by 600 mV,corrosion current density decreases by 110 μA·cm-2 and polarization resistance increases by 67.9 times in 3.5% saturated NaCl solution for AZ31 magnesium alloy after N/Ti duplex ion implantation.
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