利用非平衡磁控溅射离子镀技术在铝基轴承合金表面沉积Cp/AlSn复合镀层.采用原子力显微镜(AFM)和扫描电子显微镜(SEM)对镀层的微观形貌进行观察,并对镀层的维氏硬度和摩擦学性能进行了测试.结果表明,非平衡磁控溅射离子镀Cp/AlSn镀层,当碳靶电流在0.2~0.8A范围内,镀层呈等轴结构生长,随碳靶电流增大,镀层晶粒逐渐细化,且致密度增加;在Cp/AlSn复合镀层中,Al、Sn和C元素分别以单质形式存在,且随掺碳量增加,Cp/AlSn复合镀层非晶特征逐渐增强;随碳靶电流增加,镀层硬度增加,摩擦系数减小,电流为0.8A时,镀层硬度最高为230 HV0.025.摩擦系数最低为0.09,磨损率先减小后增大,碳靶电流为0.4A时,镀层的磨损率最低为6.6×10-16 m3/(N·m),其磨损机制逐渐由粘着磨损转变为磨粒磨损.
参考文献
[1] | 郭巧琴,蒋百灵,李建平.靶电流对磁控溅射AlSn20/C镀层耐蚀性的影响[J].中国有色金属学报,2012(08):2289-2294. |
[2] | Karl E Spear;John P Dismukes.Synthetic Diamond:Emerging CVD Science and Technology[M].New York:John Wiley and Sons,Inc,1996:450-462. |
[3] | 郭巧琴,蒋百灵,李建平,吴兵.基体偏压对磁控溅射AlSn20镀层组织形貌与性能的影响[J].特种铸造及有色合金,2011(04):308-310. |
[4] | Lugscheider E.;Bobzin K.;Lackner K. .Investigations of mechanical and tribological properties of CrAlN+C thin coatings deposited on cutting tools[J].Surface & Coatings Technology,2003(0):681-686. |
[5] | P. J. Kelly;R. D. Arnell .Magnetron sputtering: a review of recent developments and applications[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2000(3):159-172. |
[6] | Nir D .Stress relief forms of diamond like carbon thin films under internal compressive stress[J].THIN SOLID FILMS,1984,112(01):41-49. |
[7] | S. P. Bugaev;V. G. Podkovyrov;K. V. Oskomov;S. V. Smaykina;N. S. Sochugov .Ion-assisted pulsed magnetron sputtering deposition of Ta-C films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(1/2):16-26. |
[8] | Yongjun Wang;Hongxuan Li;Li Ji;Fei Zhao;Qinghua Kong;Yongxia Wang;Xiaohong Liu;Weilong Quan;Huidi Zhou;Jianmin Chen .Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering[J].Surface & Coatings Technology,2011(8/9):3058-3065. |
[9] | S. Logothetidis;M. Gioti;C. Charitidis;P. Patsalas .A new process for the development of hard and stable sputtered amorphous carbon films[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,1999(1/2):61-65. |
[10] | Window B;Savvides N .Unbalanced dc magnetrons as sources of high ion fluxes[J].Journal of Vacuum Science and Technology A:Vacuum Surfaces and Films,1986,4(03):453-456. |
[11] | Yang SC;Wiemann E;Teer DG .The properties and performance of Cr-based multilayer nitride hard coatings using unbalanced magnetron sputtering and elemental metal targets[J].Surface & Coatings Technology,2004(0):662-668. |
[12] | L.Z. Ouyang;H. Wang;M. Zhu .Microstructure of MmM_5/Mg multi-layer films prepared by magnetron sputtering[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2005(0):485-489. |
[13] | Ken'ichi Hiratsuka;Ken'ichi Muramoto .Role of wear particles in severe-mild wear transition[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,2005(1):467-476. |
[14] | Arnell RD;Kelly PJ;Bradley JW .Recent developments in pulsed magnetron sputtering[J].Surface & Coatings Technology,2004(0):158-163. |
[15] | Lan D F .Wear characteristics research on aluminum alloy bearing containing silicon[J].Mining and Metallurgy Engineering,2011,20(06):67-69. |
[16] | 白力静,蒋百灵,文晓斌,张国君,何家文.热氧化温度对磁控溅射CrTiAlN梯度镀层表面形貌与组织结构的影响[J].材料热处理学报,2005(04):111-114. |
[17] | Zhao W G .Review of the development and level of locomotive diesel engine bearing both at home and abroad[J].Railway Locomotive Vehicle Workers,2006,4(06):1-7. |
[18] | Jin ZH. .Effect of thermal property gradients on the edge cracking in a functionally graded coating[J].Surface & Coatings Technology,2004(2/3):210-214. |
[19] | Johann R G;Roland Dubach .Soft physical vapor deposition coatings-a new coating family for high performance cutting tools[J].Surface and Coatings Technology,1993,60(01):584-586. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%