Aluminum nitride (AlN) nanowires, serrated nanoribbons, and nanoribbons were selectively obtained through a simple chloride assisted chemical vapor deposition process. The morphologies of the products could be controlled by adjusting the deposition position and the flux of the reactant gas. The morphologies and structures of the AlN products were investigated in detail. The formation mechanism of the as-prepared different morphologies of AlN one-dimensional (1D) nanostructures was discussed on the basis of the experimental results.
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