(Ba,Sr)TiO3(简称BST)铁电薄膜材料是目前国际上新型功能材料研究的热点之一,本文综述了钛酸锶钡(BST)铁电薄膜目前最常用的4种制备工艺,并简要介绍了BST目前的研究进展、微观结构、性能及应用,深入分析了BST铁电薄膜主要制备技术的优缺点,指出了目前铁电薄膜及其制备技术研究中应注意的问题.
BST ferroelectric thin film is one of the new functional materials with attractive application prospects. The preparation of the ferroeleetric thin film was described. The microstrueture, characteristic and application of ferroe-lectric thin films were studied. The advantages and disadvantages of different preparation methods are discussed. Some research problems of this material which need to be paid more attention to are put forward.
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