利用直流磁控溅射法在室温水冷玻璃衬底上制备出了高质量的掺钛氧化锌透明导电薄膜(ZnO: Ti).研究了溅射压强对ZnO: Ti薄膜结构、形貌和光电性能的影响.研究结果表明,溅射压强对ZnO: Ti 薄膜的结构和电阻率有显著影响.X射线衍射(XRD)表明,ZnO: Ti 薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向.在溅射压强为5.0 Pa时,实验获得的ZnO: Ti薄膜电阻率最小值为1.084 ×10~(-4) Ω· cm.实验制备的ZnO: Ti 薄膜具有良好的附着性能,可见光区平均透过率超过91%.ZnO: Ti薄膜可以用作薄膜太阳能电池和液晶显示器的透明电极.
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