Study on Environmental Multi-parameter Sensor Based on MEMS

稀有金属材料与工程, 2006, 35(z2): 377-380.

Hongquan Zhang ^1, , Tong Zhang ^2, , Likai Sun ^3, , Yunbo Shi ^4, , Jianying Guo ^5,

1.Harbin University of Science and Technology, Harbin 150080, China;Northeast Transducer Technology Research Institute, Harbin 150001, China

2.Automobile Electronic Engineering Technology Research and Development Center, Harbin 150001, China

3.Northeast Transducer Technology Research Institute, Harbin 150001, China

4.Northeast Transducer Technology Research Institute, Harbin 150001, China

5.Harbin University of Science and Technology, Harbin 150080, China

基金项目: The authors would like to thank the financial support of the NSFC project(60272002) 973 project(2003ccc01100)

Study on Environmental Multi-parameter Sensor Based on MEMS

Keywords： Al2O3 membrane

A new membrane type Al2O3 micromachining material is used. We develop an environmental multi-parameter detection micro-system, which implements the detection to temperature, humidity, wind speed, and CO. The test results illustrate that the heat-release unit in micro-system intercross greatly affects other sensing units on the temperature. We study the method of etching process, which formed cavity to reduce the heat exchange efficiency and decrease temperature intercross effect.

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Study on Environmental Multi-parameter Sensor Based on MEMS

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