采用纳米压痕技术对微电子封装中无铅焊点内界面化合物(IMC) Cu6Sn5的弹性模量和硬度进行了测试.根据实际工业工艺流程和服役工况,制备接近真实服役状态下的微电子封装中无铅焊点界面化合物试样;采用扫描电镜(SEM)和能量色散X射线荧光光谱仪(EDX)确定IMC的形貌和化学成分；利用连续刚度测量(CSM)技术,采用不同的加载速率对无铅焊点(Sn3.0Ag0.5Cu、Sn0.7Cu和Sn3.5Ag)内的界面化合物Cu6Sn5进行测量,得到载荷、硬度和弹性模量-位移曲线.根据纳米压痕结果确定Cu6Sn5的蠕变应力指数.
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