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以电沉积制备的Cu-In预制膜为衬底材料,硫粉为原料,尝试了Cu-In预制膜以一定速度移动的特殊硫化方法.采用SEM和EDS观察和分析了它们的表面形貌和成分,采用XRD表征了薄膜的组织结构,并分析了硫化中的反应动力学过程.结果表明:Cu-In预制膜由CuIn和CuIn2混合相组成,由其形成的CIS薄膜中除了CuInS2相以外,还出现CuxS二元相.KCN刻蚀处理去除表层的CuxS相后,底层的CuInS2薄膜具有黄铜矿相结构,与基底附着性较好.当速度为3.3V0时,CuInS2薄膜高质量结晶,薄膜均匀、致密,组分接近化学计量比,沿(112)面择优取向生长,适合于制备CIS太阳能电池吸收层.

参考文献

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