在X射线衍射结果的基础上,采用极图法研究了AIN薄膜以(DO2)和(100)面的取向分布,发现在一定条件下制备的AIN(002)有很强的织构,并通过极图法来确定X射线衍射所无法确定的AIN(100)面择优取向薄膜中各晶粒c轴间的关系.
Based on the X-ray diffraction results, the textures of aluminium nitride films were investigated by using the pole-figure method. Aluminium nitride thin films prepared have a high (002) plane texture, and most of the c-axis of particles are parallel with the normal of the substrate. Aluminium nitride thin films with (100) orientation are necessary, as they are applied to surface acoustic wave devices, and the pole-figure results are very useful for determining the c-axis of particles direction in the A1N (100) thin films.
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