Synthesis of Anatase Titania Nanostructures at Room Temperature by PECVD Technique

材料科学技术（英文）, 2011, 27(8): 696-700.

Synthesis of Anatase Titania Nanostructures at Room Temperature by PECVD Technique

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1.Materials Physics and Engineering Division, National Physical Laboratory, Council of Scientific ＆： Industrial Research （CSIR）, New Delhi 110 012, India

2.Materials Physics and Engineering Division, National Physical Laboratory, Council of Scientific ＆： Industrial Research （CSIR）, New Delhi 110 012, India

3.Physics of Energy Harvesting Division, National Physical Laboratory, Council of Scientific ＆ Industrial Research （CSIR）, New Delhi 110 012, India

基金项目: 0

关键词： PECVD技术 , 二氧化钛 , 纳米结构 , 等离子体增强化学气相沉积 , 傅里叶变换红外光谱 , 锐钛矿型 , 合成 , 室温

Synthesis of Anatase Titania Nanostructures at Room Temperature by PECVD Technique

Keywords： Nanostructures , Plasma enhanced chemical vapor deposition , Anatase titania ,

titania nanostructures have been synthesized at room temperature by plasma enhanced chemical vapor deposition （PECVD） process on silicon （100） substrates using titanium tetraisopropoxide [Ti（OC3H7）4, TTIP] vapor, argon and oxygen mixtures under various deposition pressures. The deposited titania has been characterized for its structural, morphological and chemical composition by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray （EDX） spectroscopy and Fourier transform infrared （FTIR） spectroscopy recordings. With the variation of deposition pressure, titania assumes various nanostructures viz. nanocrystals, nanoparticles, noanorods and comb-like structure. EDX and FTIR measurements show that the deposited titania is of high chemical purity. The possible growth mechanisms for the observed titania nanostructures have been discussed.

参考文献

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Synthesis of Anatase Titania Nanostructures at Room Temperature by PECVD Technique

Synthesis of Anatase Titania Nanostructures at Room Temperature by PECVD Technique

参考文献