在室温、10 Pa氩气环境下,采用脉冲激光烧蚀(PLA)技术,通过改变激光能量密度,在烧蚀点正下方、与烧蚀羽辉轴线平行放置的衬底上沉积制备了一系列纳米Si晶薄膜.采用SEM、Raman散射谱和XRD对纳米Si晶薄膜进行了表征.结果表明:沉积在衬底上的纳米Si晶粒分布在距靶一定的范围内,晶粒尺寸随与靶面距离的增加先增大后减小；随着激光能量密度的增加,晶粒在衬底上的沉积范围双向展宽,但沉积所得最大晶粒尺寸基本保持不变,只是沉积位置随激光能量密度的增加相应后移.结合流体力学模型、成核分区模型和热动力学方程,通过模拟激光烧蚀靶材的动力学过程,对纳米Si晶粒的成核生长动力学过程进行了研究.
参考文献
| [1] | Yoshida T;Takeyama S;Yamada Y et al.Nanometer-sized Silicon Crystallites Prepared by Excimer Laser Ablation in Constant Pressure Inert Gas[J].Applied Physics Letters,1996,68(13):1772-1774. |
| [2] | 邓泽超,褚立志,丁学成,梁伟华,傅广生,王英龙.激光退火实现非晶Si晶化的成核势垒研究[J].人工晶体学报,2009(04):876-879. |
| [3] | Kim JH.;Jeon KA.;Choi JB.;Lee SY. .Laser wavelength and partial pressure effects on the formation of nanocrystalline Si[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2003(1/3):146-149. |
| [4] | 王英龙,褚立志,邓泽超,闫常瑜,傅广生.调整靶衬间距实现纳米Si晶粒尺寸的均匀可控[J].中国激光,2009(04):989-992. |
| [5] | Kima M S;Kim E S .Fabrication of Conical Shape-Si Particle by Pulsed Laser Ablation[J].Current Applied Physics,2009,9:S58-S61. |
| [6] | Wang YL;Deng ZC;Fu GS;Zhou Y;Chu LZ;Peng YC .The average size of Si nanoparticles prepared by pulsed laser ablation in the gas mixture of He/Ar, Ne/Ar or He/Ne[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(4):1897-1900. |
| [7] | Fu GS;Wang YL;Chu LZ;Zhou Y;Yu W;Han L;Peng YC .The size distribution of Si nanoparticles prepared by pulsed-laser ablation in pure He, Ar or Ne gas[J].EPL,2005(5):758-762. |
| [8] | Wang, YL;Deng, ZC;Chu, LZ;Fu, GS;Peng, YC .The difference of energies of Si atoms with single-crystalline, amorphous, free and nanoparticle configurations[J].EPL,2009(1):15001:-15001:5. |
| [9] | Wang, YL;Chen, C;Ding, XC;Chu, LZ;Deng, ZC;Liang, WH;Chen, JZ;Fu, GS .Nucleation and growth of nanoparticles during pulsed laser deposition in an ambient gas[J].Laser and Particle Beams,2011(1):105-111. |
| [10] | He Y L;Yin C Z;Cheng G X et al.Tne Structure and Properties of Nanosize Crystalline Silicon Films[J].Journal of Applied Physics,1994,75(02):797-803. |
| [11] | Patterson A L .The Scherrer Formula for X-Ray Particle Size Determination[J].Physical Review,1939,56(10):978-982. |
| [12] | Xinyu-Tan;Duanming-Zhang;Boming-Yu;Li ZH;Li G;Li L .Vaporization effect studying on high-power nanosecond pulsed laser deposition[J].Physica, B. Condensed Matter,2005(1/4):86-92. |
| [13] | Tetsuya Makimura;Taiji Mizuta;Kouichi Murakami .Formation dynamics of silicon nanoparticles after laser ablation studied using plasma emission caused by second-laser decomposition[J].Applied physics letters,2000(11):1401-1403. |
| [14] | Geohegan DB.;Duscher G.;Pennycook SJ.;Puretzky AA. .Time-resolved imaging of gas phase nanoparticle synthesis by laser ablation[J].Applied physics letters,1998(23):2987-2989. |
| [15] | Tetsuya Makimura;Taiji Mizuta;Kouichi Murakami .Formation dynamics of silicon nanoparticles after laser ablation studied using plasma emission caused by second-laser decomposition[J].Applied physics letters,2000(11):1401-1403. |
| [16] | Junichi Muramoto;Takahiro Inmaru;Yoshiki Nakata .Spectroscopic imaging of nanoparticles in laser ablation plume by redecomposition and laser-induced fluorescence detection[J].Applied physics letters,2000(15):2334-2336. |
| [17] | S. S. Harilal;C. V. Bindhu;M. S. Tillack;F. Najmabadi;A. C. Gaeris .Internal structure and expansion dynamics of laser ablation plumes into ambient gases[J].Journal of Applied Physics,2003(5):2380-2388. |
| [18] | L. Torrisi;L. Ando;G. Ciavola;S. Gammino;A. Barna .Angular distribution of ejected atoms from Nd:YAG laser irradiating metals[J].Review of Scientific Instruments,2001(1):68-72. |
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