本文用场离子显微镜(FIM)对金属外延层的结构进行了原子级的观察。 超晶格外延生长的条件依赖于表面能和晶格参数的匹配。在表面能匹配条件被满足的情况下,从原子级尺度来看,外延生长中存在各种缺陷,例如空位、空位团、空洞、位错和孪晶。产生缺陷主要是外延材料与衬底晶格参数失配引起的。 实验观察到在一定条件下外延生长会使金属表面合金化。可能的机制是交换扩散机制。
Observation of epitaxial overlayer of metals at atomic level has beensuccessfully observed in field ion microscope with 5 ns pulsed-laser heating. Thecondition of superlattice layer growth depends on the surface free energy and thelattice misfit. Many defects, such as vacancies, vacancy clusters, voids, dislocationsand twins are produced during epitaxial growth because of the lattice misfit eventhough the condition of surface free energy is satisfied. Alloying is observed tooccur on the surface of the metal during the epitaxial growth. Diffusion is proba-bly via the exchange mechanism.
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