飞秒激光因其在烧蚀固体材料时的独特机制,具有高精度高微结构的能力,表现出广阔的工程应用前景,因此近年来关于飞秒激光的研究受到广泛关注.报道了近年来飞秒激光的实验测定方法,综述了用于研究由激光加热引起的微尺度热传导的几种数值模型和方法,着重描述了分子动力学数值模拟方法,分析总结了现有的烧蚀机制,并展望了其发展前景.
参考文献
[1] | Momma C.;Nolte S.;Vonalvensleben F.;Tunnermann A. Welling H.;Wellegehausen B.;Chichkov BN. .SHORT-PULSE LASER ABLATION OF SOLID TARGETS[J].Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter,1996(1/2):134-142. |
[2] | 彭志农,贾威,王清月.飞秒激光玻璃微加工技术[J].纳米技术与精密工程,2008(02):114-117. |
[3] | Willmott PR.;Huber JR. .Pulsed laser vaporization and deposition[J].Reviews of Modern Physics,2000(1):315-328. |
[4] | 张端明,李智华,郁伯铭,黄明涛,关丽,钟志成,李国栋.脉冲激光制备薄膜材料的机理[J].中国科学A辑,2001(08):743-753. |
[5] | 聂玲清,纪红玲,陈英颖.激光烧蚀进样电感耦合等离子体质谱法在冶金分析中的应用进展[J].冶金分析,2007(05):30-36. |
[6] | Elsayedali H E;Herman J W .Picosecond time-resolved surface-lattice temperature probe[J].Applied Physics Letters,1990,57(15):1508. |
[7] | 刘运全,梁文锡,张杰,吴建军,田进寿,王俊峰,赵宝升.飞秒电子衍射系统的静态特性研究[J].物理学报,2006(12):6500-6505. |
[8] | Chichkov B N;Momma C;Nolte S et al.Femtosecond,picosecond and nanosecond laser ablation of solids[J].Appl Phys A-Mater Sci Proc,1996,63(02):109. |
[9] | Preuss S;Demchuk A;Stuke M .Subpicosecone UV laserablation of metals[J].Appl Phys A-Mater Sci Proc,1995,61(01):33. |
[10] | Sokolowski-Tinten K.;Cavalleri A.;von der Linde D. Oparin A.;Meyer-ter-Vehn J.;Anisimov SI.;Bialkowski J. .Transient states of matter during short pulse laser ablation[J].Physical review letters,1998(1):224-227. |
[11] | J. Perriere;E. Millon;W. Seiler;C. Boulmer-Leborgne;V. Craciun;O. Albert;J. C. Loulergue;J. Etchepare .Comparison between ZnO films grown by femtosecond and nanosecond laser ablation[J].Journal of Applied Physics,2002(2):690-696. |
[12] | Nolte S;Chichkov B N;Welling H et al.Nanostructuring with spatially localized femtosecond laser pulses[J].Optics Letters,1999,24(13):914. |
[13] | 余本海,戴能利,王英,李玉华,季玲玲,郑启光,陆培祥.飞秒激光烧蚀LiNbO3晶体的形貌特征与机理研究[J].物理学报,2007(10):5821-5826. |
[14] | 杨洗陈,汪刚,赵友博,王明伟.飞秒激光制备阵列孔金属微滤膜[J].中国激光,2007(08):1155-1158. |
[15] | Henyk M.;Reif J.;Wolfframm D. .Ultra short laser pulse induced charged particle emission from wide bandgap crystals[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(1/4):263-266. |
[16] | Henyk M.;Wolfframm D.;Reif J.;Mitzner R. .Laser-induced ion emission from dielectrics[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(0):249-255. |
[17] | Henyk M.;Costache F.;Reif J. .Ultra short laser pulse ablation from sodium chloride - the role of laser induced color centers[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2002(0):90-95. |
[18] | Ashkenasi D;Rosenfeld A;Varel H et al.Laser processing of sapphire with picosecond and sub-picosecond pulses[J].Applied Surface Science,1997,120(1-2):65. |
[19] | Schaffer CB.;Garcia JF.;Mazur E.;Brodeur A. .Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy[J].Optics Letters,2001(2):93-95. |
[20] | 季忠刚,邓蕴沛,冷雨欣,李儒新,徐至展.飞秒激光多脉冲烧蚀研究进展[J].激光与光电子学进展,2003(09):14-20. |
[21] | 袁大军,蒋中伟,郭锐,徐藻,王翔,黄文浩,夏安东,褚家如.飞秒激光双光子复杂结构的微细加工[J].微细加工技术,2004(02):27-30,36. |
[22] | N.N. Nedialkov;P.A. Atanasov;S. Amoruso;R. Bruzzese;X. Wang .Laser ablation of metals by femtosecond pulses: Theoretical and experimental study[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2007(19):7761-7766. |
[23] | Sokolowski-Tinten K;Bialkowski J;Cavalleri A et al.Dynamics of femtosecond laser induced ablation from solid surfaces[J].High-Power Laser Ablation Pts 1-2,1998,3343:46. |
[24] | Sokolowski-Tinten K;Kudryashov S;Terrmov V.Femtosecond laser-induced ablation of graphite[A].Charleston,South Carolina,2000 |
[25] | Rethfeld B;Sokolowski-Tinten K;Von Der Linde D et al.Timescales in the response of materials to femtosecond laser excitation[J].Appl Phy A-Mater Sci Proc,2004,79(4-6):767. |
[26] | Huang L.;Glezer EN.;Mazur E.;Callan JP. .GaAs under intense ultrafast excitation: Response of the dielectric function[J].Physical review letters,1998(1):185-188. |
[27] | Sokolowski-Tinten K.;Boing M.;Cavalleri A.;von der Linde D.;Bialkowski J. .Thermal and nonthermal melting of gallium arsenide after femtosecond laser excitation[J].Physical Review.B.Condensed Matter,1998(18):R11805-R11808. |
[28] | Zhigilei L V;Kodali P B S;Garrison B J .Molecular dynamics model for laser ablation and desorption of organic solids[J].Journal of Physical Chemistry B,1997,101(11):2028. |
[29] | 王秋军,徐红玉,宋亚勤,张元冲.微尺度热传导理论及金属薄膜的短脉冲激光加热[J].微纳电子技术,2003(11):18-23. |
[30] | Joseph D D;Preziosi L .Heat waves[J].Rev Modem Phys,1989,61(01):41. |
[31] | Joseph D D;Preziosi L .Addendum tothe paper heat waves[J].Reviews of Modern Physics,1990,62(02):375. |
[32] | Tzou D Y .Ultrafast heat transport:The lagging behavior[J].Terahertz and Gigahertz Photonics,1999,3795:234. |
[33] | Anisimov S I;Kapeliov B;Perelman T L .Electron-emission from surface of metals induced by ultrashort laser pulses[J].Zhurnal Eksperimentalnoi I Teoredcheskoi Fiziki,1974,66(02):776. |
[34] | Fujimoto J G;LiuJ M;Ippen E P et al.Femtosecond laser interaction with metallic tungsten and nonequilibrium elec-tron and lattice temperatures[J].Physical Review Letters,1984,53(19):1837. |
[35] | Qiu T Q;Tien C L .Heat-transfer mechanisms during shortpulse laser-heating of metals[J].J Heat Transfer-Trans Asme,1993,115(04):835. |
[36] | L. A. Falkovsky;E. G. Mishchenko .Electron-lattice kinetics of metals heated by ultrashort laser pulses[J].Journal of Experimental and Theoretical Physics,1999(1):84-88. |
[37] | Chen JK.;Beraun JE. .Numerical study of ultrashort laser pulse interactions with metal films[J].Numerical Heat Transfer, Part A. Application: An International Journal of Computation and Methodology,2001(1):1-20. |
[38] | Chen JK.;Beraun JE.;Grimes LE.;Tzou DY. .Modeling of femtosecond laser-induced non-equilibrium deformation in metal films[J].International Journal of Solids and Structures,2002(12):3199-3216. |
[39] | 张端明,关丽,郁伯铭,李智华.Monte Carlo Simulation of Growth of Thin Film Prepared by Pulsed Laser[J].中国物理快报(英文版),2003(02):263-266. |
[40] | 辛建婷,祝文军,刘仓理.飞秒激光辐照铝材料的分子动力学数值模拟[J].爆炸与冲击,2004(03):207-211. |
[41] | Perez D.;Lewis LJ. .Molecular-dynamics study of ablation of solids under femtosecond laser pulses - art. no. 184102[J].Physical review, B. Condensed matter and materials physics,2003(18):4102-0. |
[42] | Xu X F;Cheng C R;Chowdhury I H .Molecular dynamics study of phase change mechanisms during femtosecond laser ablation[J].J Heat Transfer-Trans Asme,2004,126:727. |
[43] | Hsin-Yi Lai;Pei-Hsing Huang .Molecular Dynamics Analyses of the Femtosecond Laser-induced Grain Boundary Spallation[J].Journal of the Chinese Society of Mechanical Engineers, Series C: Transactions of the Chinese Society of Mechanical Engineers,2007(6):577-583. |
[44] | Chang C;Xu X .Molecular dynamic study of volumetric phase change induced by a femtosecond laser pulse[J].Appl Phys A-Mater Sci Proc,2004,79(4-6):761. |
[45] | Jin ZH.;Lu K.;Ma E.;Gumbsch P. .Melting mechanisms at the limit of superheating - art. no. 055703[J].Physical review letters,2001(5):5703-0. |
[46] | Ivanov DS;Rethfeld B;O'Connor GM;Glynn TJ;Volkov AN;Zhigilei LV .The mechanism of nanobump formation in femtosecond pulse laser nanostructuring of thin metal films[J].Applied physics, A. Materials science & processing,2008(4):791-796. |
[47] | Delarubia T D .Irradiation-induced defect production in elemental metals and semiconductors.A review of recent molecular dynamics studies[J].Annual Review of Materials Science,1996,26:613. |
[48] | Yamashita Y;Yokomine T et al.Heat transport analysis of femtosecond laser ablation with full Lagrangian modified molecular dynamics[J].International Journal of Theoretical Physics,2006,27(02):627. |
[49] | Yamashita Y;Yokomine T;Ebara S et al.Heat transport analysis for femtosecond laser ablation with molecular dynamics-two temperature model method[J].Fusion Engineering and Design,2006,81(8-14):1695. |
[50] | Schaible M .Empirical molecular dynamics modeling of silicon and silicon dioxide.A review[J].Critical Review in Solid State and Materials Sciences,1999,24(04):265. |
[51] | Lai HY;Huang PH .Atomistic simulations of spallation dynamics in multilayer thin-film interface excited by femtosecond laser[J].Computational Materials Science,2008(4):498-507. |
[52] | T.OKAMOTO;E.OHMURA;T.SANO;I.MYAMOTO;Y.MORISHIGE .Analytical study on metal microstructures using femtosecond laser[J].Applied physics, A. Materials science & processing,2005(3):639-643. |
[53] | Perez D.;Lewis LJ. .Ablation of solids under femtosecond laser pulses - art. no. 255504[J].Physical review letters,2002(25):5504-0. |
[54] | Tuckerman M E .Ab initio molecular dynamics:Basic concepts,current trends and novel applications[J].J PhysCondensed Matter,2002,14(50):1297. |
[55] | Silvestrelli P L;Alavi A;Parrinello M et al.Ab initio molecular dynamics simulation of laser melting of silicon[J].Physical Review Letters,1996,77(15):3149. |
[56] | Rethfeld B.;Sokolowski-Tinten K.;von der Linde D. .Ultrafast thermal melting of laser-excited solids by homogeneous nucleation - art. no. 092103[J].Physical Review.B.Condensed Matter,2002(9):2103-0. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%