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The influence of reaction temperature on the preparation of SiC coating on carbon fibers by the reaction of silicon monoxide with the deposited pyrolytic carbon (PyC) layer has been discussed. With rising reaction temperature, the thickness of SiC layer increases and the SiC grain is coarsening. The apparent activation energy for the synthesis of SiC layer is about 103.3 kJ/mol. The oxidation resistance of carbon fiber can be improved by the SiC/PyC layers significantly. The initial oxidation temperature of the SiC/PyC coated carbon fiber is about 300°C higher than that of the uncoated carbon fiber. The oxidation of the SiC/PyC coated carbon fiber is owing to the diffusion of oxygen through the cracks generated by the mismatch of thermal expansion.

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