采用纳米压痕能够获得薄膜硬度、模量、膜层状态、粘接性能、断裂韧性等力学性能.纳米划痕可以表征薄膜/基体的表面状况、结合力、耐磨损等性能.纳米冲击可以研究薄膜/基体的脆韧性、失效机理等力学行为.综述了纳米压痕、纳米划痕及纳米冲击在薄膜/基体体系力学性能表征中的应用原理.
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