近些年来,TiO2功能薄膜以其卓越的性能,尤其是优异的光催化性能引起研究人员的广泛关注.本文根据国内外近期TiO2功能薄膜的研究现状,对化学气相沉积法、水解-沉淀法、液相沉积法、溶胶-凝胶法、原子层沉积法、溅射法、激光辅助分子束沉积法等化学和物理制备方法进行评述,并比较详细地探讨了表面羟基含量、膜的厚度和孔径、结晶形态、基片种类、掺杂和光强度等因素对TiO2薄膜光催化性能的影响.
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