高速钢衬底上生长金刚石非常困难.分析了高速钢衬底上生长高质量金刚石涂层的不利因素,综述了国内外消除不利因素所采取的措施和研究趋势,比较了预处理方法和沉积温度对金刚石涂层质量的影响,并在此基础上提出了低温条件下在高速钢刀具表面制备高质量金刚石涂层的新方法.
参考文献
| [1] | Weiser P S;Prawer S;Hoffman A et al.Carbon diffusion in uncoated and titanium nitride coated iron substrates during microwave plasma assisted chemical vapor deposition of diamond[J].Journal of Applied Physics,1992,72(10):4643-4648. |
| [2] | 张艳梅,潘俊德,李忠厚,徐重.金刚石薄膜用钢基表面过渡层研究进展[J].材料导报,2006(09):86-88,97. |
| [3] | Gowri M;Li H;Kacsich T;Schermer JJ;van Enckevort WJP;ter Meulen JJ .Critical parameters in hot filament chemical vapor deposition of diamond films on tool steel substrates with CrN interlayers[J].Surface & Coatings Technology,2007(26):4601-4608. |
| [4] | Bareiss C;Perle M;Rosiwal S M et al.Diamond coating of steel at high temperature in hot filament chemical vapor deposition (HFCVD) employing chromium interlayer[J].Diamond and Related Materials,2006,15(4 -8):754-760. |
| [5] | Qi Hua Fan;A. Fernandes;J. Gracio .Diamond coating on steel with a titanium interlayer[J].Diamond and Related Materials,1998(2/5):603-606. |
| [6] | F.J.G. Silva;A.P.M. Baptista;E. Pereira;V. Teixeira;Q.H. Fan;A.J. Fernandes;F.M. Costa .Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers[J].Diamond and Related Materials,2002(9):1617-1622. |
| [7] | Schafer L;Fryda M;Stolley T et al.Chemical vapor deposition of polycrystalline diamond films on high-speed steel[J].Surface and Coatings Technology,1999,116 - 119:447-451. |
| [8] | Silva FJG;Fernandes AJS;Costa FM;Baptista APM;Pereira E .Unstressed PACVD diamond films on steel pre-coated with a composite multilayer[J].Surface & Coatings Technology,2005(1):102-107. |
| [9] | F.J.G.Silva;A.J.S.Fernandes;F.M.Costa;A.P.M.Baptista;E.Pereira .A new interlayer approach for CVD diamond coating of steel substrates[J].Diamond and Related Materials,2004(4-8):828-833. |
| [10] | Polini R;Mantini P F;Braic M et al.Chemical vapour deposition of polycrystalline diamond films on high-speed steel[J].THIN SOLID FILMS,2006,494:116-122. |
| [11] | Riccardo P;Giorgio M;Roberta V et al.Raman spectroscopy characterization of diamond films on steel substrates with titanium carbide arc-plated interlayer[J].THIN SOLID FILMS,2006,515:1011-1016. |
| [12] | Y.S. Li;Y. Tang;Q. Yang .Diamond deposition on steel substrates with an Al interlayer[J].International Journal of Refractory Metals & Hard Materials,2009(2):417-420. |
| [13] | Amar M;Ahmed W;Sein H.Deposition of polycrystalline diamond films on high speed steel using TiN interlayer[A].Orlando:AMS International,2004:83-86. |
| [14] | M. Amar;W. Ahmed;H. Taylor .Hot-Filament Chemical Vapor Deposition Of Polycrystalline Diamond Coatings To Interlayered Steel[J].Journal of Materials Engineering and Performance,2006(2):187-191. |
| [15] | Fenker M.;Fusser HJ.;Jorgensen G.;Lahres M.;Wolf GK.;Ferber H. .Deposition of CVD diamond onto ion beam modified ASP 23 cutting tools[J].Surface & Coatings Technology,1998(1/3):1053-1059. |
| [16] | VITTAYA AMORNKITBAMRUNG;THANUSIT BURINPRAKHON;WIRAT JARERNBOON .NANOCRYSTALLINE DIAMOND FILMS ON HIGH SPEED STEEL BY MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION[J].International journal of nanoscience,2005(2):213-227. |
| [17] | Amornkitbamrung, V;Burinprakhone, I;Jarernboon, W .Hexagonal diamond formation on steel substrates by negative bias microwave plasma enhanced chemical vapor deposition[J].Surface & Coatings Technology,2009(12):1645-1648. |
| [18] | Nishizaki T;Takano Y;Nagao M;Takenouchi T;Kawarada H;Kobayashi N .Low-temperature STM/STS studies on boron-doped (111) diamond films[J].The journal of physics and chemistry of solids,2008(12):3027-3030. |
| [19] | Pradhan D;Lee Y C;Pao C W et al.Low temperature growth of ultrananocrystalline diamond film and its fieldmission properties[J].Diamond and Related Materials,2006,15:2001-2005. |
| [20] | You M S;Nan Hong F C;Jeng Y R et al.Low temperature growth of highly transparent nanoorystalline diamond fillms on quartz glass by hot lament chemical vapor deposition[J].Diamond and Related Materials,2009,18(2 - 3):155-159. |
| [21] | Piazza F;Morell G .Synthesis of diamond at sub 300 ℃substrate temperature[J].Diamond and Related Materials,2007,16:1950-1957. |
| [22] | Z. Remes;A. Kromka;M. Vanecek .The RF plasma surface chemical modification of nanodiamond films grown on glass and silicon at low temperature[J].Diamond and Related Materials,2007(4/7):671-674. |
| [23] | Q. Yang;W. Chen;C. Xiao .Low temperature synthesis of diamond thin films through graphite etching In a microwave hydrogen plasma[J].Carbon: An International Journal Sponsored by the American Carbon Society,2005(12):2635-2638. |
| [24] | Yang, Q;Tang, Y;Yang, SL;Li, YS;Hirose, A .Simultaneous growth of diamond thin films and carbon nanotubes at temperatures <= 550 degrees C[J].Carbon,2008(4):589-595. |
| [25] | 陈光华;卢阳华 .不锈钢衬底上沉积类金刚石薄膜的硬度[J].无机材料学报,1996,11(04):639-644. |
| [26] | 曾效舒,魏秉庆,梁吉,吴德海.高速钢表面渗硅沉积金刚石[J].南昌大学学报（工科版）,2000(02):16-19,80. |
| [27] | 黄元盛,邱万奇,罗承萍,刘宏伟,陈灵.钢渗铬层上金刚石薄膜的表面、界面结构及附着性[J].理化检验-物理分册,2007(05):217-220. |
| [28] | 韩佳宁,赵庆勋,文钦若,辛红丽.直流辉光等离子体助进热丝CVD法沉积金刚石薄膜[J].河北师范大学学报(自然科学版),2002(01):48-50. |
| [29] | Hao TH;Zhang H;Shi CR;Han GR .Nano-crystalline diamond films synthesized at low temperature and low pressure by hot filament chemical vapor deposition[J].Surface & Coatings Technology,2006(3/4):801-806. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%