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The hot working characteristics of delta phase in the delta-processed Inconel 718 alloy during isothermal compression deformation attemperature of 950 degrees C and strain rate of 0.005 s(-1), were studied by using optical microscope, scanning electron microscope and quantitative X-ray diffraction technique. The results showed that the dissolution of plate-like delta phase and the precipitation of spherical 8 phase particles coexisted during the deformation, and the content of delta phase decreased from 7.05 wt.% to 5.14 wt.%. As a result of deformation breakage and dissolution breakage, the plate-like delta phase was spheroidized and transferred to spherical delta phase particles. In the center with largest strain, the plate-like delta phase disappeared and spherical delta phase appeared in the interior of grains and grain boundaries. (C) 2009 Elsevier Inc. All rights reserved.