本文介绍了一种新的湿化学成膜法一液相沉积法,对液相沉积法制备氧化物薄膜的原理、工艺流程及成膜的种类和性能进行了详细阐述,并概述了其发展和应用前景.
参考文献
| [1] | Nagayama H;Honda H;Kawahara H .[J].Journal of the Electrochemical Society,1988,135(08):2013-2016. |
| [2] | Homma T;Katoh T;Yarnada Y et al.[J].NEC Research and Development,1991,32:315. |
| [3] | Homma T;Katoh T;Yamada Y et al.[J].Journal of the Electrochemical Society,1993,140(08):2410-2414. |
| [4] | Horiuchi T.;Kanba K. .A 7-mask CMOS process with selective oxide deposition[J].IEEE Transactions on Electron Devices,1993(8):1455-1460. |
| [5] | 青木裕一;福原太一;藤江浩 等.[J].新素材,1995,6(01):37. |
| [6] | Shigehito Deki;Yoshifumi Aoi;Yasuhiro Asaoka et al.[J].Journal of Materials Chemistry,1997,7(05):733-736. |
| [7] | Akihiro Hishinuma;Takuji Goda;Masaki Kitaoka et al.[J].Applied Surface Science,1991,48-49:405-408. |
| [8] | Kawahara H;Goda T;Nagayama H.Proceedings of International Congress on Optical Science and Engineering[C].,1989:1128. |
| [9] | Yoshitomi S;Tomioka S;Honeji N.Proceedings of the 1992 International Electron Devices and Materials Symposium[C].,1992:22. |
| [10] | Chou Jenq-Shiuh;Lee Si-Chen .[J].Journal of the Electrochemical Society,1994,141(11):3214-3218. |
| [11] | Houng Mau-Phon;Wang Yeong-Her;Wang Na-Fu et al.[J].Japanese Journal of Applied Physics,1997,36(6A):L696-L698. |
| [12] | Huang Chen-Tang;Chang Peng-Heng;Shie Jin-Shown .[J].Journal of the Electrochemical Society,1996,143(06):2044-2048. |
| [13] | Shigehito Deki;Yoshifumi Aoi;Hiroshi Yanagimoto et al.[J].Journal of Materials Chemistry,1998,6(12):1879-1882. |
| [14] | Suzuki S;Tokou N;Mabuchi T et al.[J].Bulletin of the Chemical Society of Japan,1995,68(05):1275-1279. |
| [15] | 河原秀夫;猪野寿一;竹村和夫 .[J].工业材料(日本),1990,38:69. |
| [16] | Nitta Seiji;Kimura Yuji .[J].Journal of the Society of Materials Science Japan,1994,43(494):1437-1443. |
| [17] | Masaki Kitaoka;Hisao Honda;Harunobu Yoshida et al.[J].Vacuum,1991,42(16):1068. |
| [18] | Kitaoka Masaki;Honda Hisao;Yoshida Harunobu .[J].Proceedings of the IEEE-The International Society for Optical Engineering,1991,1519:109-114. |
| [19] | 阪井康人 .[J].表面技术,1998,49(01):35-38. |
| [20] | 出来成人;青井芳史 .[J].表面(日本),1998,36(06):23-30. |
| [21] | Pliskin W A .[J].Journal of Vacuum Science and Technology,1977,14(05):1064-1081. |
| [22] | Juichi INO;Kazuo Takemura;Hideo Kawahara.[J].ファィンケミカル,1990(06):5-12. |
| [23] | Shigehito Deki;Yoshifumi Aoi;Osamu Hiroi.[J].Chemistry Letters,1996:433-434. |
| [24] | Hirotsugu Kishimoto;Koichi Takahama;Noboru Hashimoto et al.[J].Journal of Materials Chemistry,1998,8(09):2019-2024. |
| [25] | Shigehito Deki;Yoshifumi Aoi .[J].Journal of Materials Research,1998,13(04):883-890. |
| [26] | Deki S;Aoi Y;Okibe J et al.[J].Journal of Materials Chemistry,1997,7(09):1769. |
| [27] | Deld S;Aoi Y;Kajinami A .[J].Journal of Materials Science,1997,32(16):4269-4273. |
| [28] | Deki S;Aoi Y;Miyake Y et al.[J].Materials Research Bulletin,1996,31(11):1399-1406. |
| [29] | Takeshi Yao;Takashi Inui;Akira Ariyoshi .[J].Journal of the American Ceramic Society,1996,79(12):3329-3330. |
| [30] | Sakai Y;Goda T;Hishinuma A .[J].Key Engineering Materials,1991,53-55:474-479. |
| [31] | Koji Tsukuma;Tomoyuki Akiyama;Nobusuke Yamada et al.[J].Journal of Non-Crystalline Solids,1998,231(1-2):161-168. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%