总结了实验测量近场辐射传热的相关研究,指出对这种传热方式的实验测量中,利用当前的扫描探针技术控割两薄膜间距为微米级或纳米级并且保持相互平行是极其困难的,提出了结合CMOS(互补金属氧化物半导体)和MEMS(微机电系统)微加工工艺构造具有固定间隙平行薄膜结构的新思路.
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