采用磁控溅射技术在Si衬底上沉积Si/[Fe(10 nm)/Nb(4 nm)/Fe(4 nm)/Nb(4 nm)]_2/[Fe(4nm)/Nb(4 nm)]_4多层膜.用2 MeV的Xe离子在室温下辐照多层膜.采用俄歇深度剖析、X射线衍射和振动样品磁强计分析辐照引起的多层膜元素分布、结构及磁性变化.AES深度剖析谱显示当辐照注量达到1.0×10~(14) ions/cm~2时,多层膜界面两侧元素开始混合;当辐照注量达到2.0×10~(16) ions/cm~2时,多层膜层状结构消失,Fe层与Nb层几乎完全混合.XRD谱显示,当辐照注量达到1.0×10~(14) ions/cm~2时,Nb的衍射峰和Fe的各衍射峰的峰位相对于标准卡片向小角方向偏移,这说明辐照引起Nb基和Fe基FeNb固溶体相的形成;当辐照注量大于1.0×10~(15) ions/cm~2时,辐照引起非晶相的出现.VSM测试显示,多层膜的磁性随着结构的变化而变化.在此实验基础上,对离子辐照引起界面混合现象的机理进行了探讨.
The behavior of the metallic multilayers of si/[Fe(10 nm)/Nb(4 nm)/Fe(4 nm)/Nb(4 nm)]_2/[Fe(4 nm)/Nb(4 nm)]_4 under 2 MeV Xe-ion irradiation has been investigated by depth profile analysis of Auger electron spectroscopy,X-ray diffraction and vibrating sample mag-netometer.The obtained experimental results show that the inter-mixing between Fe and Nb lay-ers occurs in the 1.0×10~(14) ions/cm~2 irradiated multilayer sample which results in the formation of Nb-based and Fe-based FeNb solid solution.For the samples irradiated to fluence larger than 1.0 ×10~(14) ions/cm~2,amorphisation is observed,and moreover,the layered structure of the multilayer samples is broken up completely for the samples under 1.0×10~(16) or 2.0×10~(16) ions/cm~2 irradia-tion.Vibrating sample magnetometer measurement also reveals that the magnetization of the sam-ples changes with the evolution of the structure of multilayers.Possible mechanism of the modifi-cation in Fe/Nb multilayers induced by Xe-ion irradiation is briefly discussed.
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