利用负偏压增强热丝化学气相沉积系统在沉积有过渡层Ta和催化剂层NiFe的Si衬底上制备出准直碳纳米管,并用扫描电子显微镜研究了它们的生长和结构,结果表明辉光放电和压强对其生长和结构有极大的影响.若无辉光放电产生,碳纳米管是弯曲的,有辉光放电时,碳纳米管是准直的.当压强较大时,准直碳纳米管较容易生长,并且随着压强的减小,其平均直径减小和平均长度增大.但压强为5Pa时,准直碳纳米管却不能够生长.最后,分析和讨论了辉光放电和压强对准直碳纳米管生长和结构的影响.
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