本文在Luthra模型基础上考虑到氧化物的加入对元素通过短路通道的扩散没有阻碍作用,建立了金属-氧化物扩散障的修正模型。计算结果与实验规律吻合。
A modified model for the metal-oxide diffusion barrier has been estab-lished on the basis of Luthra's one. In addition to volume diffusion, short circuitdiffusion is also considered. Calculated results are in agreement with the experi-mental ones obtained in previous studies.
参考文献
| [1] | |
| [2] | |
| [3] | |
| [4] |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%