THEORY DEPOSITION MODEL AND INFLUENCING FACTORS DURING PROCESS OF PREPARING MICRO-LAYER LAMINATE BY EBPVD

金属学报(英文版), 2004, 17(3): 283-287.

^1, , ^2, , ^3,

1.Center for Composite Materials, Harbin Institute of Technology, Harbin 150001, China

2.Center for Composite Materials, Harbin Institute of Technology, Harbin 150001, China

3.Center for Composite Materials, Harbin Institute of Technology, Harbin 150001, China

基金项目: 中国博士后科学基金(LB0047) 黑龙江省自然科学基金(E01-07)

THEORY DEPOSITION MODEL AND INFLUENCING FACTORS DURING PROCESS OF PREPARING MICRO-LAYER LAMINATE BY EBPVD

Keywords： micro-layer composite material

This paper briefly introduces the characteristics of electron beam physical vapor deposition (EBPVD) technique and the whole process of preparing micro-layer composite laminate. And several major influencing factors are presented and discussed. It was found that residual gas pressure should be low enough to guarantee the unobstructed transportation of vapor steam and electron beam; the evaporation method and evaporation speed are up to the different vapor pressure deficit of compositions of raw materials; and the substrate temperature could have great influence on the microstructure of the micro-layer laminates.

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THEORY DEPOSITION MODEL AND INFLUENCING FACTORS DURING PROCESS OF PREPARING MICRO-LAYER LAMINATE BY EBPVD

参考文献