利用FactSage software软件进行热力学计算,获得了CH3SiCl3(MTS)-BCl3-H2体系在化学气相沉积环境中Si-B-C陶瓷的热力学产物图和相图.讨论了在高温(900～1100℃)、低压(2 kPa、5 kPa和12 kPa)条件下系统总压、温度和反应气体比例等参数对主要产物产率的影响.结果表明,在所研究的参数范围内,系统总压、温度和气体比例对B4C相的产率影响比较明显,而对SiC相的产率影响不明显.气体比例对C相的产率影响比较明显,温度和系统总压对C相的产率影响不明显.各参数的变化对主要气态产物(BHx、CxHy、SiClx等)的产率有一定程度的影响.稀释气体分压的增加有利于富B相的生成,MTS分压的增加有利于SiC的生成.
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