薄膜硬度测试是薄膜力学性能表征的一个重要方面. 针对硬膜软基底系统, 引入界面约束的概念, 以球形空洞扩张理论为基础, 并假设薄膜和基底分别发生柱面和径向变形, 建立了一个新的薄膜本征硬度和复合硬度关系模型, 并对其正确性进行了验证. 应用该模型, 可从薄膜复合硬度中分离出本征硬度. 新模型与Burnett-Rickerby模型相比, 建立了新的界面约束因子表达式, 该界面约束因子包含泊松比的影响, 并且其值并不依据经验判断来确定, 而由膜基弹塑性性能来确定.
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