建立了CVD金刚石膜{100}取向生长过程中的化学反应模型,表面吸附生长机制以沟槽处碳氢组元加入的机制为主,并用改进的KMC方法在原子尺度上模拟了该模型下(100)表面的生长过程,给出了衬底温度和甲基浓度等操作参数对膜质量的影响.结果表明,该化学反应模型能够较实际地揭示{100}取向CVD金刚石膜的生长.
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