(Ti,Al)N是20世纪80年代末期在TiN基础上发展起来的一种新型多元涂层材料.由于加入Al元素,(Ti,Al)N不但硬度、耐磨性优于TiN,而且大大改善了涂层的抗高温氧化性能.综述了Al元素在(Ti,Al)N涂层中的作用机理,以及Al含量对(Ti,Al)N涂层的晶体结构、抗高温氧化、硬度和耐磨性的影响.指出当Ti和Al的比例近似为1:1时,(ti,Al)N涂层将获得优越的综合使用性能.
参考文献
[1] | Molarrius J M;Skorhoner A S .Comparison of cutting performance of ion-plated NbN,ZrN,TiN and (TiAl)N coatings[J].Surface and Coatings,1987(33):117. |
[2] | Sundgren J E;Johasson B O;Karlsson S E .Mechanisms of reactive sputtering of titanium nitride and titanium carbide[J].Thin Solid Films,1983,105:353. |
[3] | Palmers J;Stappen M V.Deposition of (Ti,Al)N coatings by means of electron beam ion plating with evaporation of Ti and A1 from two separate crucibles[J].Surface and Coatings Technology,1995:363. |
[4] | Musil J;Hruby H .Superhard nanocomposite Ti1-x AlxN films prepared by magnetron sputtering[J].Thin Solid Films,2000,365:104. |
[5] | 王永康,夏立芳,雷廷权,熊仁章,白羽.TiAlN/Ti多元复合涂层的截面透射电镜研究[J].兵器材料科学与工程,2000(06):12-15. |
[6] | Konter O;Munz W D .Industrial deposition of binary,ternary,and quaternary nitrides of titanium,zirconium,and aluminium[J].Journal of Vacuum Science and Technology,1987,a5(04):2173. |
[7] | 王永康,熊仁章,雷廷权,夏立芳,李炳生.Ti1-xAlxN涂层的组织结构及Al元素的作用机理[J].宁波大学学报(理工版),2001(04):48-51. |
[8] | 李明升,陈柯伟,王福会,徐家寅.空心阴极离子镀TiAlN复合薄膜结构及抗氧化性能的研究[J].腐蚀科学与防护技术,2001(z1):411-414,486. |
[9] | Wahlstrom U;Hultman L;Sundgren J E .Crystal growth and microstructure of polycrystalline Ti1-xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering[J].Thin Solid Films,1993,235:62. |
[10] | 胡数兵;梅志;李志章 等.离子镀TiN涂层的高温特性[J].中国有色金属学报,1999,9(z1):204. |
[11] | 丁晖,刘颂,陈可炜.(Ti,A1)N镀层的结构及氧化行为[J].沈阳工业大学学报,2001(01):4-6. |
[12] | Ichimura H;Kawana A.High-temperature oxidation of ion-plated TiN and TiAlN films[J].Journal of Materials Research,1999(08):1093. |
[13] | 王永康,雷廷权,夏立芳,熊仁章.Ti0.5Al0.5N涂层的抗高温氧化行为[J].材料工程,2001(01):12-14. |
[14] | Huang J L;Shew B Y .Effects of aluminum concentration on the oxidation behaviors of reactively sputtered TiAlN films[J].Journal of the American Ceramic Society,1999,82:696. |
[15] | Roos J R;Celis J P;Vancoille E et al.Interralationship between processing,coating properties and functional properties of steered arc physically vapour deposited (Ti,Al)N and (Ti,Nb)N coatings[J].Thin Solid Films,1990,193-194:547. |
[16] | Mcintyre D;Greene J E;Hakansson G et al.Oxidation of metastable single-phase polycrystalline Ti0.5 Al0.5 N films:knetics and mechanisms[J].Journal of Applied Physics,1990,67:1542. |
[17] | Konig U .Deposition and properties of multicomponent hard coatings[J].Surface and Coatings Technology,1987,33:91. |
[18] | Yoon S Y;Kim J K;Kim K H .A comparative study on tribological behavior of TiN and TiA1N coatings prepared by arc ion plating technique[J].Surface and Coatings Technology,2002,161:237. |
[19] | Lii DF. .The effects of aluminium composition on the mechanical properties of reactivity sputtered TiAlN films[J].Journal of Materials Science,1998(8):2137-2145. |
[20] | Shew B Y;Huang J L .Quantitative AES investigation of magnetron sputtered Ti-Al-N films[J].Surface and Coatings Technology,1995,73:66. |
[21] | Rainforth W M;Leonard A J;Perrin C et al.High resolution observations of friction-induced oxide and its interaction with the worn surface[J].Tribology International,2002,35:731. |
[22] | 蒋生蕊;彭栋梁;赵学应.直流磁控溅射沉积(Ti,Al)N膜的研究[J].金属学报,1994(05):233. |
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