目的 研究模具钢微细蚀刻中,蚀刻速率的变化规律.方法 采用蚀刻液喷淋加工方式,对掩膜的模具钢表面进行蚀刻,考察掩膜间隙、蚀刻液喷淋压力、蚀刻液温度对蚀刻速率的影响. 结果 蚀刻速率随掩膜间隙尺寸的增大而增加,当掩膜尺寸大于150μm时,蚀刻速率增长较快;较大的喷淋压力有利于蚀刻液的更新和蚀刻产物的排除,使得蚀刻反应充分,蚀刻速率较高;温度在一定范围内升高,蚀刻液活性增大,蚀刻效率提高,蚀刻速率增大.结论 最佳工艺条件为:掩膜间隙尺寸150 ～ 200 μm,蚀刻液喷淋压力1.0～1.4MPa,蚀刻液温度35～ 40℃.在此加工条件下,模具钢的蚀刻速率高,加工效率高,同时可以保证较好的蚀刻尺寸精度.
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