气体混合流动在MEMS的应用中常常遇到.本文采用直接模拟Monte Carlo方法研究了氮气和氧气在微尺度中的流动混合问题.数值模拟中设定两种气体分别以不同的速度,相同的数密度进入微槽道.当经过分割平板之后,两种气体发生混合.在对结果的分析中发现,进入速度对两种气体完全混合后的混合距离,以及完全混合后的单组份气体占混合气体的比例都会产生重要的影响.
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