在不同的生长阶段Au膜具有不同的表面微结构.随着厚度的增加,薄膜晶粒要经历成核、正常晶粒生长和反常晶粒生长过程,在不同的过程中Au膜呈现出不同的表面形貌.在正常晶粒生长阶段,薄膜晶粒呈柱状生长;随后的反常晶粒生长过程中会出现晶粒吸收现象,使具有较优取向的晶粒越长越大.X射线衍射图(XRD)显示Au膜具有(111)面取向优势.利用LSW理论模型计算并解释了晶粒反常生长过程.
参考文献
| [1] | Lifshitz I M;Slyozov VV .[J].Journal of Experimental and Theoretical Physics,1958,21:479. |
| [2] | Wagner C .[J].Zeitschrift Fur Elektrochemie,1961,65:581. |
| [3] | Hillert M .[J].Acta Materialia,1965,13:227. |
| [4] | Thompson C V .[J].Journal of Applied Physics,1985,58:763. |
| [5] | Movchan B A;Demchishin A V .[J].Fizika Metallov I Metallovedenie,1969,28:83. |
| [6] | Thornton J A .[J].Journal of Vacuum Science and Technology,1974,11:666. |
| [7] | Thornton J A .[J].Annual Review of Materials Science,1977,7:239. |
| [8] | Anderson M P;Srolovitz D J;Grest G S;Sahni P S et al.[J].Acta Materialia,1984,32:783. |
| [9] | Srolovitz D J;Anderson M P;Sahni P S;Grest G S et al.[J].Acta Materialia,1984,32:793. |
| [10] | Srolovitz D J;Grest G S;Anderson M P et al.[J].Acta Materialia,1985,33:2233. |
| [11] | Lee C;Lin J C .[J].Thin Solid Films,1997,307:96. |
| [12] | Tang L;Thomas G .[J].Journal of Applied Physics,1993,74(08):5025. |
| [13] | Frost H J .[J].Materials Characterization,1994,32:257. |
| [14] | Johnson W A;Mehl R F .[J].Transactions AIME,1939,135:416. |
| [15] | Evans U R .[J].Transactions of The Faraday Society,1945,41:365. |
| [16] | Frost H J;Thompson C V .[J].Acta Materialia,1999,47:1879. |
| [17] | Smith C S.Metal Interfaces[M].A S M Cleveland, OH,1952:65-113. |
| [18] | Mullins W W .[J].Acta Materialia,1958,6:414. |
| [19] | Rollert A D;Srolovitz D J;Anderson M P et al.[J].Acta Materialia,1989,37:1227. |
| [20] | Thompson C V;Carel R .[J].Materials Science and Engineering B,1995,32:211. |
| [21] | Grunwaldt JD.;Gobel U.;Baiker A.;Atamny F. .PREPARATION OF THIN SILVER FILMS ON MICA STUDIED BY XRD AND AFM[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1996(4):353-359. |
| [22] | Adamik M.;Tomov I.;Barna PB. .Correlation between texture and average grain size in polycrystalline Ag thin films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1):33-38. |
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